Principles and Applications of NanoMEMS Physics
MLA
Santos, Héctor J, and Héctor De Los Santos. Principles and Applications of Nanomems Physics. Springer US, 2005.
APA
Santos, H. J, & De Los Santos, H. (2005). Principles and Applications of NanoMEMS Physics. Springer US.
Chicago
Santos, Héctor J., and Héctor De Los Santos. Principles and Applications of Nanomems Physics. : Springer US, 2005.