Sputtering by Particle Bombardment
MLA
Ascheron, Claus E, et al. Sputtering by Particle Bombardment. Springer Berlin Heidelberg, 2007.
APA
Ascheron, C. E, Behrisch, R., Eckstein, W., & Skolaut, W. (2007). Sputtering by Particle Bombardment. Springer Berlin Heidelberg.
Chicago
Ascheron, Claus E., Rainer Behrisch, Wolfgang Eckstein, and Werner Skolaut. Sputtering by Particle Bombardment. : Springer Berlin Heidelberg, 2007.