MLA

Grasser, Tibor, and Siegfried Selberherr. Simulation of Semiconductor Processes and Devices 2007. Springer Vienna, 2007.

APA

Grasser, T., & Selberherr, S. (2007). Simulation of Semiconductor Processes and Devices 2007. Springer Vienna.

Chicago

Grasser, Tibor, and Siegfried Selberherr. Simulation of Semiconductor Processes and Devices 2007. : Springer Vienna, 2007.