Reactive Sputter Deposition

MLA

Hull, Robert, et al. Reactive Sputter Deposition. Springer Berlin Heidelberg, 2008.

APA

Hull, R., Depla, D., Mahieu, S., & Osgood, R. (2008). Reactive Sputter Deposition. Springer Berlin Heidelberg.

Chicago

Hull, Robert, Diederik Depla, Stijn Mahieu, and R.M Osgood. Reactive Sputter Deposition. : Springer Berlin Heidelberg, 2008.