Low Pressure Plasmas and Microstructuring Technology
MLA
Franz, Gerhard. Low Pressure Plasmas and Microstructuring Technology. Springer Berlin Heidelberg, 2009.
APA
Franz, G. (2009). Low Pressure Plasmas and Microstructuring Technology. Springer Berlin Heidelberg.
Chicago
Franz, Gerhard Low Pressure Plasmas and Microstructuring Technology. : Springer Berlin Heidelberg, 2009.
