MLA

Tan, Chuan Seng; Gutmann, Ronald J.; Reif, L. Rafael, et al. Wafer Level 3-d Ics Process Technology. Springer US, 2008.

APA

Tan, L. Rafael, Gutmann, R. J, Reif, R., Tan, C. Seng, & Reif, L. Rafael. (2008). Wafer Level 3-D ICs Process Technology. Springer US.

Chicago

Tan, Chuan Seng; Gutmann, Ronald J.; Reif, L. Rafael, Ronald J Gutmann, Rafael Reif, Chuan Seng Tan, and L. Rafael Reif. Wafer Level 3-D Ics Process Technology. : Springer US, 2008.