MLA

Shacham-Diamand, Yosi; Osaka, Tetsuya; Datta, Madhav, et al. Advanced Nanoscale Ulsi Interconnects: Fundamentals and Applications. Springer New York, 2009.

APA

Shacham-Diamand, M., Osaka, T., Shacham-Diamand, Y., Datta, M., & Ohba, T. (2009). Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications. Springer New York.

Chicago

Shacham-Diamand, Yosi; Osaka, Tetsuya; Datta, Madhav, Tetsuya Osaka, Yosi Shacham-Diamand, Madhav Datta, and Takayuki Ohba. Advanced Nanoscale ULSI Interconnects: Fundamentals and Applications. : Springer New York, 2009.