Multi-Wafer Rotating MEMS Machines

MLA

Jeffrey Lang, and Jeffrey H Lang. Multi-wafer Rotating Mems Machines. Springer US, 2010.

APA

Jeffrey Lang, J. Lang, & Lang, J. H. (2010). Multi-Wafer Rotating MEMS Machines. Springer US.

Chicago

Jeffrey Lang, and Jeffrey H Lang. Multi-Wafer Rotating MEMS Machines. : Springer US, 2010.