MLA

Rebohle, Lars, and Wolfgang Skorupa. Rare-earth Implanted Mos Devices for Silicon Photonics. Springer Berlin Heidelberg, 2010.

APA

Rebohle, L., & Skorupa, W. (2010). Rare-Earth Implanted MOS Devices for Silicon Photonics. Springer Berlin Heidelberg.

Chicago

Rebohle, Lars, and Wolfgang Skorupa. Rare-Earth Implanted MOS Devices for Silicon Photonics. : Springer Berlin Heidelberg, 2010.