Microelectronic Test Structures for CMOS Technology
MLA
Bhushan, Manjul, and Mark B Ketchen. Microelectronic Test Structures for Cmos Technology. Springer New York, 2011.
APA
Bhushan, M., & Ketchen, M. B. (2011). Microelectronic Test Structures for CMOS Technology. Springer New York.
Chicago
Bhushan, Manjul, and Mark B Ketchen. Microelectronic Test Structures for CMOS Technology. : Springer New York, 2011.