Handbook of Thin Film Deposition (3rd Edition)
MLA
Krishna Seshan (ed), and Krishna Seshan. Handbook of Thin Film Deposition (3rd Edition). William Andrew Publishing, 2012.
APA
Krishna Seshan (ed), K. Seshan (ed), & Seshan, K. (2012). Handbook of Thin Film Deposition (3rd Edition). William Andrew Publishing.
Chicago
Krishna Seshan (ed), and Krishna Seshan. Handbook of Thin Film Deposition (3rd Edition). : William Andrew Publishing, 2012.