Sputtering Materials for VLSI and Thin Film Devices

MLA

Sarkar, Jaydeep, and Paul S Gilman. Sputtering Materials for Vlsi and Thin Film Devices. William Andrew Publishing, 2010.

APA

Sarkar, J., & Gilman, P. S. (2010). Sputtering Materials for VLSI and Thin Film Devices. William Andrew Publishing.

Chicago

Sarkar, Jaydeep, and Paul S Gilman. Sputtering Materials for VLSI and Thin Film Devices. : William Andrew Publishing, 2010.