Introductory MEMS

MLA

Adams, Thomas M, Richard A Layton, and Hermann A Maurer. Introductory Mems. Springer US, 2010.

APA

Adams, T. M, Layton, R. A, & Maurer, H. A. (2010). Introductory MEMS. Springer US.

Chicago

Adams, Thomas M., Richard A Layton, and Hermann A Maurer. Introductory MEMS. : Springer US, 2010.