MEMS: A Practical Guide to Design, Analysis, and Applications

MLA

Korvink, Jan; Paul, Oliver, Jan G Korvink, and Oliver Paul. Mems: A Practical Guide to Design, Analysis, and Applications. Springer Berlin Heidelberg, 2006.

APA

Korvink, O., Korvink, J. G, & Paul, O. (2006). MEMS: A Practical Guide to Design, Analysis, and Applications. Springer Berlin Heidelberg.

Chicago

Korvink, Jan; Paul, Oliver, Jan G Korvink, and Oliver Paul. MEMS: A Practical Guide to Design, Analysis, and Applications. : Springer Berlin Heidelberg, 2006.