MEMS Reliability

MLA

Hartzell, Allyson L, et al. Mems Reliability. Springer US, 2011.

APA

Hartzell, A. L, da Silva, M. G, Silva, M., Shea, H., & Shea, H. R. (2011). MEMS Reliability. Springer US.

Chicago

Hartzell, Allyson L., Mark G da Silva, Mark Silva, Herbert Shea, and Herbert R Shea. MEMS Reliability. : Springer US, 2011.