MEMS Materials and Processes Handbook

MLA

Reza Ghodssi, Reza Ghodssi, and Pinyen Lin. Mems Materials and Processes Handbook. Springer US, 2011.

APA

Reza Ghodssi, R. Ghodssi, Ghodssi, R., & Lin, P. (2011). MEMS Materials and Processes Handbook. Springer US.

Chicago

Reza Ghodssi, Reza Ghodssi, and Pinyen Lin. MEMS Materials and Processes Handbook. : Springer US, 2011.