MEMS and Nanotechnology, Volume 6

MLA

Shaw, Gordon A, et al. Mems and Nanotechnology, Volume 6. Springer New York, 2013.

APA

Shaw, G. A, Prorok, B., Prorok, B. C, & Starman, L. A. (2013). MEMS and Nanotechnology, Volume 6. Springer New York.

Chicago

Shaw, Gordon A., Bart Prorok, Barton C Prorok, and LaVern A Starman. MEMS and Nanotechnology, Volume 6. : Springer New York, 2013.