Handbook of Sputter Deposition Technology

MLA

Kiyotaka Wasa, et al. Handbook of Sputter Deposition Technology. William Andrew Publishing, 2012.

APA

Kiyotaka Wasa, K. Wasa, Adachi, H., Kanno, I., Kotera, H., & Wasa, K. (2012). Handbook of Sputter Deposition Technology. William Andrew Publishing.

Chicago

Kiyotaka Wasa, Hideaki Adachi, Isaku Kanno, Hidetoshi Kotera, and Kiyotaka Wasa. Handbook of Sputter Deposition Technology. : William Andrew Publishing, 2012.