Poly-SiGe for MEMS-above-CMOS Sensors

MLA

Ruiz, Pilar Gonzalez, et al. Poly-sige for Mems-above-cmos Sensors. Springer Netherlands, 2014.

APA

Ruiz, P. Gonzalez, De Meyer, K., Gonzalez Ruiz, P., & Witvrouw, A. (2014). Poly-SiGe for MEMS-above-CMOS Sensors. Springer Netherlands.

Chicago

Ruiz, Pilar Gonzalez, Kristin De Meyer, Pilar Gonzalez Ruiz, and Ann Witvrouw. Poly-Sige for Mems-Above-Cmos Sensors. : Springer Netherlands, 2014.