MEMS and Nanotechnology, Volume 5

MLA

Shaw, Gordon, et al. Mems and Nanotechnology, Volume 5. Springer International Publishing, 2014.

APA

Shaw, G., Prorok, B. C, Shaw III, G., Furlong, C., & Starman, L. (2014). MEMS and Nanotechnology, Volume 5. Springer International Publishing.

Chicago

Shaw, Gordon, Barton C Prorok, Gordon Shaw III, Cosme Furlong, and LaVern Starman. MEMS and Nanotechnology, Volume 5. : Springer International Publishing, 2014.