Plasma Etching Processes for Interconnect Realization in VLSI

MLA

Posseme, Nicolas, et al. Plasma Etching Processes for Interconnect Realization In Vlsi. Elsevier, 2015.

APA

Posseme, N., Chevolleau, T., Maxime, D., & Thibaut, D. (2015). Plasma Etching Processes for Interconnect Realization in VLSI. Elsevier.

Chicago

Posseme, Nicolas, Thierry Chevolleau, Darnon Maxime, and David Thibaut. Plasma Etching Processes for Interconnect Realization In VLSI. : Elsevier, 2015.