Silicon Semiconductor Technology : Processing and Integration of Microelectronic Devices

MLA

Hilleringmann, Ulrich. Silicon Semiconductor Technology : Processing and Integration of Microelectronic Devices. Wiesbaden: Springer Fachmedien Wiesbaden GmbH, 2023.

APA

Hilleringmann, U. (2023). Silicon Semiconductor Technology : Processing and Integration of Microelectronic Devices. Wiesbaden: Springer Fachmedien Wiesbaden GmbH.

Chicago

Hilleringmann, Ulrich. Silicon Semiconductor Technology : Processing and Integration of Microelectronic Devices. Wiesbaden: Springer Fachmedien Wiesbaden GmbH, 2023.