MLA

Yu, Bei, and David Z Pan. Design for Manufacturability with Advanced Lithography. Springer International Publishing, 2016.

APA

Yu, B., & Pan, D. Z. (2016). Design for Manufacturability with Advanced Lithography. Springer International Publishing.

Chicago

Yu, Bei, and David Z Pan. Design for Manufacturability with Advanced Lithography. : Springer International Publishing, 2016.