Design for Manufacturability with Advanced Lithography
MLA
Yu, Bei, and David Z Pan. Design for Manufacturability with Advanced Lithography. Springer International Publishing, 2016.
APA
Yu, B., & Pan, D. Z. (2016). Design for Manufacturability with Advanced Lithography. Springer International Publishing.
Chicago
Yu, Bei, and David Z Pan. Design for Manufacturability with Advanced Lithography. : Springer International Publishing, 2016.