Advances in chemical mechanical planarization (CMP)

MLA

Babu, Suryadevara. Advances In Chemical Mechanical Planarization (cmp). Woodhead Publishing, 2016.

APA

Babu, S. (2016). Advances in chemical mechanical planarization (CMP). Woodhead Publishing.

Chicago

Babu, Suryadevara Advances In Chemical Mechanical Planarization (CMP). : Woodhead Publishing, 2016.