Materials and processes for next generation lithography

MLA

Robinson, Alex; Lawson, Richard, and Richard Lawson. Materials and Processes for Next Generation Lithography. Elsevier, 2016.

APA

Robinson, R., & Lawson, R. (2016). Materials and processes for next generation lithography. Elsevier.

Chicago

Robinson, Alex; Lawson, Richard, and Richard Lawson. Materials and Processes for Next Generation Lithography. : Elsevier, 2016.