Plasma Etching Processes for CMOS Devices Realization

MLA

Posseme, Nicolas. Plasma Etching Processes for Cmos Devices Realization. Elsevier, 2017.

APA

Posseme, N. (2017). Plasma Etching Processes for CMOS Devices Realization. Elsevier.

Chicago

Posseme, Nicolas Plasma Etching Processes for CMOS Devices Realization. : Elsevier, 2017.