Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

MLA

Kenichi Takahata. Advances In Micro/nano Electromechanical Systems and Fabrication Technologies. InTech, .

APA

Kenichi Takahata, K. Takahata. Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies. InTech.

Chicago

Kenichi Takahata Advances In Micro/nano Electromechanical Systems and Fabrication Technologies. : InTech.