MLA

Goodnick, Anatoli Korkin, and Robert Nemanich. Semiconductor Nanotechnology. Springer International Publishing, 2018.

APA

Goodnick, G., Korkin, A., & Nemanich, R. (2018). Semiconductor Nanotechnology. Springer International Publishing.

Chicago

Goodnick, Anatoli Korkin, and Robert Nemanich. Semiconductor Nanotechnology. : Springer International Publishing, 2018.