Handbook of silicon based MEMS materials and technologies

MLA

Lindroos, Veikko; Motooka, Teruaki; Franssila, Sami; Paulasto-Krockel, Mervi; Tilli, Markku; Airaksinen, Veli-Matti, et al. Handbook of Silicon Based Mems Materials and Technologies. William Andrew Publishing, 2015.

APA

Lindroos, V.Lindroos, V., Airaksinen, V., Franssila, S., Motooka, T., Paulasto-Krockel, M., & Tilli, M. (2015). Handbook of silicon based MEMS materials and technologies. William Andrew Publishing.

Chicago

Lindroos, Veikko; Motooka, Teruaki; Franssila, Sami; Paulasto-Krockel, Mervi; Tilli, Markku; Airaksinen, Veli-Matti, Veikko Lindroos, Veli-Matti Airaksinen, Sami Franssila, Teruaki Motooka, Mervi Paulasto-Krockel, and Markku Tilli. Handbook of Silicon Based MEMS Materials and Technologies. : William Andrew Publishing, 2015.