Advanced MEMS/NEMS Fabrication and Sensors

MLA

Zhuoqing Yang. Advanced Mems/nems Fabrication and Sensors. Springer International Publishing, 2022.

APA

Zhuoqing Yang, Z. Yang. (2022). Advanced MEMS/NEMS Fabrication and Sensors. Springer International Publishing.

Chicago

Zhuoqing Yang Advanced MEMS/NEMS Fabrication and Sensors. : Springer International Publishing, 2022.