MARC Record
Leader
920
a| ebook
008
250703s----------------------000---eng-d
001
4540000000000048
009
ebk03
090
a| 4540000000000048
245
a| Handbook of silicon based MEMS materials and technologies
260
b| William Andrew Publishing
c| 2015
020
a| 0-323-29965-2
020
a| 0-323-31223-3
100
2
a| Lindroos, Veikko; Motooka, Teruaki; Franssila, Sami; Paulasto-Krockel, Mervi; Tilli, Markku; Airaksinen, Veli-Matti
700
1
a| Lindroos, Veikko
700
2
a| Airaksinen, Veli-Matti
700
2
a| Franssila, Sami
700
2
a| Motooka, Teruaki
700
2
a| Paulasto-Krockel, Mervi
700
2
a| Tilli, Markku
856
u| http://sfxit.ugent.be/sfx_howest?url_ver=Z39.88-2004&ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&rfr_id=info:sid/sfxit.com:opac_856&url_ctx_fmt=info:ofi/fmt:kev:mtx:ctx&sfx.ignore_date_threshold=1&rft.object_id=4540000000000048&svc_val_fmt=info:ofi/fmt:kev:mtx:sch_svc&svc.fulltext=yes&
866
s| 3850000000000461
t| 3850000000000737
x| Elsevier ScienceDirect eBooks Freedom Collection 2016:Full Text
z| 3850000001220976
866
s| 3850000000000456
t| 3850000000000732
x| Elsevier ScienceDirect eBooks Freedom Collection 2017:Full Text
z| 3850000001213302