Librarian View
LEADER 00000nas-a2200000z--4500
920
a| periodical
008
250703s----------------------000---eng-d
010
a| ---93659127-
001
958480255682
009
ejn03
090
a| 958480255682
210
a| MICROLITHOGR WORLD
245
a| Microlithography World
260
a| Port Washington, N.Y.
b| PennWell Publishing Corp.
022
a| 1074-407X
856
u| http://sfxit.ugent.be/sfx_howest?url_ver=Z39.88-2004&ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&rfr_id=info:sid/sfxit.com:opac_856&url_ctx_fmt=info:ofi/fmt:kev:mtx:ctx&sfx.ignore_date_threshold=1&rft.object_id=958480255682&svc_val_fmt=info:ofi/fmt:kev:mtx:sch_svc&svc.fulltext=yes&
866
a| Available from 2003/05/01 until 2008/11/30.
s| 4340000000000227
t| 4340000000000211
x| EBSCOhost Academic Search Ultimate:Full Text
z| 4340000000770037
650
a| Engineering
x| Electrical Engineering
650
a| Engineering
x| General and Others
650
a| Physics
x| Solid State Physics