Principles and Applications of NanoMEMS Physics

Full text!
Format:
e-book
Title:
Principles and Applications of NanoMEMS Physics
Author:
Santos, Héctor J.; De Los Santos, Héctor
Language:
English
Publisher:
Springer US 2005
ISBN:
1-4020-3238-2
1-4419-5272-1
9786610619115
1-280-61911-2
0-387-25834-5
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