Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration

Full text!
Type:
e-book
Titel:
Micromachined Thin-Film Sensors for SOI-CMOS Co-Integration
Auteur:
Laconte, Jean; Flandre, D.; Flandre, Denis; Laconte, J.; Raskin, Jean-Pierre
Taal:
Engels
Uitgever:
Springer US 2006
ISBN:
0-387-28842-2
1-4419-3957-1
9786610634378
1-280-63437-5
0-387-28843-0
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