Fast Simulation of Electro-Thermal MEMS

Full text!
Type:
e-book
Titel:
Fast Simulation of Electro-Thermal MEMS
Auteur:
Bechtold, Tamara; Korvink, Jan G.; Rudnyi, Evgenii B.
Taal:
Engels
Uitgever:
Springer Berlin Heidelberg 2007
ISBN:
3-540-34612-0
3-642-07097-3
9786610700271
1-280-70027-0
3-540-34613-9
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