Reactive Sputter Deposition

Format:: e-book
Title:: Reactive Sputter Deposition
Author:: Hull, Robert; Depla, Diederik; Mahieu, Stijn; Osgood, R.M
Language:: English
Publisher:: Springer Berlin Heidelberg 2008
ISBN:: 3-540-76662-6
3-642-09536-4
9786611512781
1-281-51278-8
3-540-76664-2
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