Multi-Wafer Rotating MEMS Machines

Format:: e-book
Title:: Multi-Wafer Rotating MEMS Machines
Author:: Jeffrey Lang; Lang, Jeffrey H.
Language:: English
Publisher:: Springer US 2010
ISBN:: 0-387-77746-6
1-4614-2459-3
9786612362514
1-282-36251-8
0-387-77747-4
Permalink:: http://bibtest.howest.be/catalog/ebk03:1000000000798431?locale=en