Atomic Layer Deposition for Semiconductors

Full text!
Format:
e-book
Title:
Atomic Layer Deposition for Semiconductors
Author:
Seong Hwang, Cheol
Language:
English
Publisher:
Springer US 2014
ISBN:
1-4614-8053-1
1-4614-8054-X
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http://bibtest.howest.be/catalog/ebk03:2550000001151416?locale=en