Precision Nanometrology

Full text!
Format:
e-book
Title:
Precision Nanometrology
Author:
Gao, Wei; Pham, D.T
Language:
English
Publisher:
Springer London 2010
ISBN:
1-84996-253-7
1-4471-5743-5
9786612981944
1-84996-254-5
1-282-98194-3
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