Poly-SiGe for MEMS-above-CMOS Sensors

Format:

e-book

Title:

Poly-SiGe for MEMS-above-CMOS Sensors

Author:

Ruiz, Pilar Gonzalez; De Meyer, Kristin; Gonzalez Ruiz, Pilar; Witvrouw, Ann

Language:

English

Publisher:

Springer Netherlands 2014

ISBN:

94-007-6798-6
94-017-8140-0
94-007-6799-4

Permalink:

http://bibtest.howest.be/catalog/ebk03:2670000000424563?locale=en