Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology

Full text!
Format:
e-book
Title:
Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology
Author:
Bhattacharyya, Bijoy
Language:
English
Publisher:
William Andrew Publishing 2015
ISBN:
0-323-32737-0
0-323-35288-X
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