Nano-tribology and Materials in MEMS

Full text!
Format:
e-book
Title:
Nano-tribology and Materials in MEMS
Author:
Sinha, Sujeet K.; Lim, Seh Chun; Satyanarayana, N.
Language:
English
Publisher:
Springer Berlin Heidelberg 2013
ISBN:
3-642-36934-0
3-642-36935-9
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