Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Full text!- Type:
- e-book
- Titel:
- Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
- Taal:
- Engels
- Uitgever:
- Springer International Publishing 2018
- ISBN:
- 3-319-76293-1
3-319-76294-X - Permalink:
- http://bibtest.howest.be/catalog/ebk03:4100000002892454
