Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Full text!
Format:
e-book
Title:
Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Author:
Shim; Shin, Youngsoo
Language:
English
Publisher:
Springer International Publishing 2018
ISBN:
3-319-76293-1
3-319-76294-X
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http://bibtest.howest.be/catalog/ebk03:4100000002892454?locale=en