Sputtering Materials for VLSI and Thin Film Devices

Full text!
Type:
e-book
Titel:
Sputtering Materials for VLSI and Thin Film Devices
Auteur:
Sarkar, Jaydeep; Gilman, Paul S.
Taal:
Engels
Uitgever:
William Andrew Publishing 2010
ISBN:
0-8155-1593-6
1-306-11995-2
0-12-810080-X
0-8155-1987-7
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