MEMS Materials and Processes Handbook

Full text!
Type:
e-book
Titel:
MEMS Materials and Processes Handbook
Auteur:
Reza Ghodssi; Ghodssi, Reza; Lin, Pinyen
Taal:
Engels
Uitgever:
Springer US 2011
ISBN:
0-387-47316-5
9786613083197
0-387-47318-1
1-283-08319-1
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