Handbook of silicon based MEMS materials and technologies

Full text!
Type:
e-book
Titel:
Handbook of silicon based MEMS materials and technologies
Auteur:
Lindroos, Veikko; Motooka, Teruaki; Franssila, Sami; Paulasto-Krockel, Mervi; Tilli, Markku; Airaksinen, Veli-Matti; Lindroos, Veikko; Airaksinen, Veli-Matti; Franssila, Sami; Motooka, Teruaki; Paulasto-Krockel, Mervi; Tilli, Markku
Taal:
Engels
Uitgever:
William Andrew Publishing 2015
ISBN:
0-323-29965-2
0-323-31223-3
Permalink:
http://bibtest.howest.be/catalog/ebk03:4540000000000048